Withdrawn | Published: 01/05/2018

ASTM E2444-11(2018) Withdrawn

Standard Terminology Relating to Measurements Taken on Thin, Reflecting Films (Withdrawn 2026)

Available languages: English

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Detail information

Designation: ASTM E2444-11(2018)

Publication date: 01/05/2018

Pages: 2

Note: Withdrawn

Country: American technical standard

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Keywords:
cantilevers, definitions, fixed-fixed beams, interferometry, length measurements, microelectromechanical systems, MEMS, polysilicon, residual strain, stiction, strain gradient, terminology, test structure,, ICS Number Code 01.040.31 (Electronics (Vocabularies)),31.240 (Mechanical structures for electronic equipment)

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