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Active standard | Published: 01/04/2024
ASTM E986-04(2024)
Standard Practice for Scanning Electron Microscope Beam Size Characterization
Available languages: English
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Detail information
Designation: ASTM E986-04(2024)
Publication date: 01/04/2024
Pages: 3
Country: American technical standard
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You can buy at www.mystandards.bizAnotation
Keywords:electron beam size, E766, graphite fiber, magnification, NIST–SRM 2069B, resolution, SEM, SEM performance, spot size, waveform ,, ICS Number Code 31.120 (Electronic display devices),37.020 (Optical equipment)
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