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Withdrawn | Published: 01/01/1992
ASTM F1366-92(1997)e1 Withdrawn
Standard Test Method for Measuring Oxygen Concentration in Heavily Doped Silicon Substrates by Secondary Ion Mass Spectrometry (Includes all amendments And changes 3/2/2021).
Available languages: English
Available design: Online Secure PDF
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Detail information
Designation: ASTM F1366-92(1997)e1
Publication date: 01/01/1992
Pages: 5
Note: Withdrawn
Country: American technical standard
Where to buy?
You can buy at www.mystandards.bizAnotation
Keywords:FTIR, oxygen, secondary ion mass spectometry, silicon
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