Withdrawn | Published: 10/12/2002

ASTM F1392-02 Withdrawn

Standard Test Method for Determining Net Carrier Density Profiles in Silicon Wafers by Capacitance-Voltage Measurements With a Mercury Probe (Withdrawn 2003)

Available languages: English

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Detail information

Designation: ASTM F1392-02

Publication date: 10/12/2002

Pages: 14

Note: Withdrawn

Country: American technical standard

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Keywords:
capacitance-voltage method, carrier density, carrier density profile, depth profile, epitaxial wafers, mercury probe, net carrier density, polished wafers, profiles, resistivity, silicon, single crystal silicon, ICS Number Code 29.045 (Semiconducting materials)

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