Withdrawn | Published: 10/12/2002

ASTM F1393-02 Withdrawn

Standard Test Method for Determining Net Carrier Density in Silicon Wafers by Miller Feedback Profiler Measurements With a Mercury Probe (Withdrawn 2003)

Available languages: English

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Detail information

Designation: ASTM F1393-02

Publication date: 10/12/2002

Pages: 8

Note: Withdrawn

Country: American technical standard

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Keywords:
depth profile, epitaxial wafers, mercury probe, miller feedback method, net carrier density, silicon, ICS Number Code 29.045 (Semiconducting materials)

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