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Active standard | Published: 30/11/2011
BS EN 62047-12:2011
Semiconductor devices. Micro-electromechanical devices. Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures.
Available languages: English
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Detail information
Designation: BS EN 62047-12:2011
Publication date: 30/11/2011
Pages: 34
Country: British technical standard
Where to buy?
You can buy at www.mystandards.bizAnotation
ISBN: 978 0 580 76301 4 Status: DefinitivePopular Publishers
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