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Active standard | Published: 19/03/2021
IEC/TR 63258-ed.1.0
Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films
Available languages: English
Available design: electronic design (pdf), Print design, CD-ROM
from 206.30 EUR
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Detail information
Designation: IEC/TR 63258-ed.1.0
Publication date: 19/03/2021
Pages: 0
Country: International technical standard
Where to buy?
You can buy at www.mystandards.bizAnotation
IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.Popular Publishers
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