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Active standard | Published: 05/04/2019
IEC 62047-34-ed.1.0
Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer
Available languages: English
Available design: electronic design (pdf), Print design, CD-ROM
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Detail information
Designation: IEC 62047-34-ed.1.0
Publication date: 05/04/2019
Pages: 16
Country: International technical standard
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You can buy at www.mystandards.bizAnotation
IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.Popular Publishers
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