Active standard | Published: 24/07/2003

ISO 20341:2003

Surface chemical analysis — Secondary-ion mass spectrometry — Method for estimating depth resolution parameters with multiple delta-layer reference materials
(Analyse chimique des surfaces — Spectrométrie de masse des ions secondaires — Méthode d´estimation des parametres de résolution en profondeur a l´aide de matériaux de référence multicouches minces)

Available languages: English

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Detail information

Designation: ISO 20341:2003

Publication date: 24/07/2003

Pages: 5

Country: International technical standard

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Anotation

Description / Abstract: ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials. It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.

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