Withdrawn | Published: 01/01/1994

ASTM F1228-89(1994)E01 Withdrawn

Test Method for Oxidizable (Organic) Carbon on Wafer Surfaces (By Persulfate) (Withdrawn 2001)

Available languages: English

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Detail information

Designation: ASTM F1228-89(1994)E01

Publication date: 01/01/1994

Pages: 4

Note: Withdrawn

Country: American technical standard

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Keywords:
Carbon content-semiconductors, Contamination-semiconductors, Electrical conductors-semiconductors, Microelectronics industry, Organic carbon (OC), Oxidizable carbon, Persulfate oxidation, Semiconductor device testing, Silicon semiconductors, Silicon semiconductors-slices/wafers, wafer surfaces-mass of deposited organic (oxidizable) carbon, contaminants, by persulfate oxidant solution, test

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