Withdrawn | Published: 01/01/1992

ASTM F1393-92(1997) Withdrawn

Standard Test Method for Determining Net Carrier Density in Silicon Wafers by Miller Feedback Profiler Measurements With a Mercury Probe

Available languages: English

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Detail information

Designation: ASTM F1393-92(1997)

Publication date: 01/01/1992

Pages: 7

Note: Withdrawn

Country: American technical standard

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Keywords:
Density-electronic applications, Depth profiling, Diodes, Electrical conductors-semiconductors, Mercury probe, Miller feedback profiler, Net carrier density (in semiconductors), Polished silicon wafers/slices, Probe methods, Resistance and resistivity (electrical)-semiconductors, Schottky barrier diode, Silicon-semiconductor applications, Single-crystal silicon, Voltage, net carrier density profiles in epitaxial/polished bulk silicon wafers,

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