Active standard | Published: 23/09/2013

ISO 13424:2013

Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film analysis
(Analyse chimique des surfaces — Spectroscopie de photoélectrons X — Rapport des résultats de l´analyse de films minces)

Available languages: English

Available design: electronic design (pdf), Print design

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Detail information

Designation: ISO 13424:2013

Publication date: 23/09/2013

Pages: 46

Country: International technical standard

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Anotation

Description / Abstract: ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.

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