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Active standard | Published: 14/08/2020
ISO 16413:2020-ed.2.0
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry — Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
(Évaluation de l´épaisseur, de la densité et de la largeur de l´interface des films fins par réflectrométrie de rayons X — Exigences instrumentales, alignement et positionnement, rassemblement des données, analyse des données et rapport)
Available languages: English
Available design: electronic design (pdf), Print design
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Detail information
Designation: ISO 16413:2020-ed.2.0
Publication date: 14/08/2020
Pages: 32
Country: International technical standard
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