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Active standard | Published: 18/07/2016
ISO 16700:2016-ed.2.0
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
(Analyse par microfaisceaux — Microscopie électronique a balayage — Lignes directrices pour l´étalonnage du grandissement d´image)
Available languages: English
Available design: electronic design (pdf), Print design
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Detail information
Designation: ISO 16700:2016-ed.2.0
Publication date: 18/07/2016
Pages: 18
Country: International technical standard
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You can buy at www.mystandards.bizAnotation
Description / Abstract: ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.Popular Publishers
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