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Semiconductor devices. Micro-electromechanical devices. Tensile testing method of thin film materials.
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Semiconductor devices. Micro-electromechanical devices. Gyroscopes.
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Semiconductor devices. Micro-electromechanical devices. Test method for Poisson´s ratio of thin film MEMS materials.
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Semiconductor devices. Micro-electromechanical devices. Electromechanical tensile test method for conductive thin films on flexible substrates.
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Semiconductor devices. Micro-electromechanical devices. Silicon based MEMS fabrication technology. Measurement method of pull-press and shearing strength of micro bonding area.
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Semiconductor devices. Micro-electromechanical devices. Description and measurement methods for micro trench and needle structures.
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Semiconductor devices. Micro-electromechanical devices. Bond strength test for glass frit bonded structures using micro-chevron-tests (MCT).
Available languages: English
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Semiconductor devices. Micro-electromechanical devices. Performance testing method of vibration-driven MEMS electret energy harvesting devices.
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Semiconductor devices. Micro-electromechanical devices. Electromechanical relaxation test method for freestanding conductive thin-films under room temperature.
Available languages: English
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Semiconductor devices. Micro-electromechanical devices. Thin film standard test piece for tensile testing.
Available languages: English
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