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BS IEC 62047-30:2017 (9.10.2017)

BS IEC 62047-30:2017 (09/10/2017)

Semiconductor devices. Micro-electromechanical devices. Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film.

Available languages: English

Available design: PDF - Immediate download, Print design

from 299.60 USD more info
BS IEC 62047-31:2019 (17.4.2019)

BS IEC 62047-31:2019 (17/04/2019)

Semiconductor devices. Micro-electromechanical devices. Four-point bending test method for interfacial adhesion energy of layered MEMS materials.

Available languages: English

Available design: PDF - Immediate download, Print design

from 214.40 USD more info
BS IEC 62047-32:2019 (29.1.2019)

BS IEC 62047-32:2019 (29/01/2019)

Semiconductor devices. Micro-electromechanical devices. Test method for the nonlinear vibration of MEMS resonators.

Available languages: English

Available design: PDF - Immediate download, Print design

from 214.40 USD more info
BS IEC 62047-33:2019 (18.4.2019)

BS IEC 62047-33:2019 (18/04/2019)

Semiconductor devices. Micro-electromechanical devices. MEMS piezoresistive pressure-sensitive device.

Available languages: English

Available design: PDF - Immediate download, Print design

from 299.60 USD more info
BS IEC 62047-34:2019 (16.4.2019)

BS IEC 62047-34:2019 (16/04/2019)

Semiconductor devices. Micro-electromechanical devices. Test methods for MEMS piezoresistive pressure-sensitive device on wafer.

Available languages: English

Available design: PDF - Immediate download, Print design

from 214.40 USD more info
BS IEC 62047-35:2019 (20.4.2021)

BS IEC 62047-35:2019 (20/04/2021)

Semiconductor devices. Micro-electromechanical devices. Test method of electrical characteristics under bending deformation for flexible electromechanical devices.

Available languages: English

Available design: PDF - Immediate download, Print design

from 299.60 USD more info
BS IEC 62047-36:2019 (24.4.2019)

BS IEC 62047-36:2019 (24/04/2019)

Semiconductor devices. Micro-electromechanical devices. Environmental and dielectric withstand test methods for MEMS piezoelectric thin films.

Available languages: English

Available design: PDF - Immediate download, Print design

from 214.40 USD more info
BS IEC 62047-37:2020 (5.4.2023)

BS IEC 62047-37:2020 (05/04/2023)

Semiconductor devices. Micro-electromechanical devices. Environmental test methods of MEMS piezoelectric thin films for sensor application.

Available languages: English

Available design: PDF - Immediate download, Print design

from 214.40 USD more info
BS IEC 62047-38:2021 (7.7.2021)

BS IEC 62047-38:2021 (07/07/2021)

Semiconductor devices. Micro-electromechanical devices. Test method for adhesion strength of metal powder paste in MEMS interconnection.

Available languages: English

Available design: PDF - Immediate download, Print design

from 214.40 USD more info
BS EN 62047-4:2010 (30.11.2010)

BS EN 62047-4:2010 (30/11/2010)

Semiconductor devices. Micro-electromechanical devices. Generic specification for MEMS.

Available languages: English

Available design: PDF - Immediate download, Print design

from 299.60 USD more info
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