ČSN - Czech national standards

Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials

Available languages: English (the title page in Czech only)

Available design: Print design

Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing

Available languages: English (the title page in Czech only)

Available design: Print design

Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS

Available languages: English (the title page in Czech only)

Available design: Print design

Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches

Available languages: English (the title page in Czech only)

Available design: Print design

Polovodičové součástky - Mikroelektromechanické součástky - Část 5: Spínače RF MEMS. (Norma přebírající anglický originál, vlastní text je součástí výtisku).

Available languages: English (the title page in Czech only)

Available design: Print design

Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials (IEC 62047-6:2009)

Available languages: English

Available design: Print design

Semiconductor devices - Micro-electromechanical devices - Part 7: MEMS BAW filter and duplexer for radio frequency control and selection

Available languages: English

Available design: Print design

Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films

Available languages: English (the title page in Czech only)

Available design: Print design

Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS

Available languages: English (the title page in Czech only)

Available design: Print design

Polovodičové součástky - Mikroelektromechanické součástky - Část 9: Měření pevnosti spojení dvou destiček pro MEMS. (Norma přebírající anglický originál, vlastní text je součástí výtisku).

Available languages: English (the title page in Czech only)

Available design: Print design