IEC - International electro-technical commission

Semiconductor devices - Micro-electromechanical devices - Part 44: Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices

Available languages: English

Available design: electronic design (pdf), Print design, CD-ROM

Semiconductor devices - Micro-electromechanical devices - Part 45: Silicon based MEMS fabrication technology - Measurement method of impact resistance of nanostructures

Available languages: English

Available design: electronic design (pdf), Print design, CD-ROM

Semiconductor devices - Micro-electromechanical devices - Part 46: Silicon based MEMS fabrication technology - Measurement method of tensile strength of nanoscale thickness membrane

Available languages: English

Available design: electronic design (pdf), Print design, CD-ROM

Semiconductor devices - Micro-electromechanical devices - Part 47: Silicon based MEMS fabrication technology - Measurement method of bending strength of microstructures

Available languages: English

Available design: electronic design (pdf), Print design, CD-ROM

Semiconductor devices - Micro-electromechanical devices - Part 48: Test method for determining solution concentration by optical absorption using MEMS fluidic device

Available languages: English

Available design: electronic design (pdf), Print design, CD-ROM

Semiconductor devices - Micro-electromechanical devices - Part 49: Temperature and humidity test methods for piezoelectric MEMS cantilevers

Available languages: English

Available design: electronic design (pdf), Print design, CD-ROM

Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches
(Dispositifs a semiconducteurs - Dispositifs microelectromecaniques - Partie 5: Commutateurs MEMS-RF)

Available languages: English and French

Available design: electronic design (pdf), Print design, CD-ROM

Corrigendum 1 - Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches
(Corrigendum 1 - Dispositifs a semiconducteurs - Dispositifs microelectromecaniques - Partie 5: Commutateurs MEMS-RF)

Available languages: English and French

Available design: electronic design (pdf), Print design, CD-ROM

Semiconductor devices - Micro-electromechanical devices - Part 50: MEMS capacitive microphones

Available languages: English

Available design: electronic design (pdf), Print design, CD-ROM

Semiconductor devices - Micro-electromechanical devices - Part 52: Biaxial tensile testing method for stretchable MEMS

Available languages: English

Available design: electronic design (pdf), Print design, CD-ROM