IEC - International electro-technical commission

Semiconductor devices - Micro-electromechanical devices - Part 18: Bend testing methods of thin film materials
(Dispositifs a semiconducteurs - Dispositifs microelectromecaniques - Partie 18: Methodes d´essai de flexion des materiaux en couche mince)

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Semiconductor devices - Micro-electromechanical devices - Part 19: Electronic compasses
(Dispositifs a semiconducteurs - Dispositifs microelectromecaniques - Partie 19: Compas electroniques)

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Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials
(Dispositifs a semiconducteurs - Dispositifs microelectromecaniques - Partie 2: Methode d´essai de traction des materiaux en couche mince)

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Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes
(Dispositifs a semiconducteurs - Dispositifs microelectromecaniques - Partie 20: Gyroscopes)

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Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson´s ratio of thin film MEMS materials
(Dispositifs a semiconducteurs - Dispositifs microelectromecaniques - Partie 21: Methode d´essai relative au coefficient de Poisson des materiaux MEMS en couche mince)

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Semiconductor devices - Micro-electromechanical devices - Part 22: Electromechanical tensile test method for conductive thin films on flexible substrates
(Dispositifs a semiconducteurs - Dispositifs microelectromecaniques - Partie 22: Methode d´essai de traction electromecanique pour les couches minces conductrices sur des substrats souples)

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Semiconductor devices - Micro-electromechanical devices - Part 25: Silicon based MEMS fabrication technology - Measurement method of pull-press and shearing strength of micro bonding area
(Dispositifs a semiconducteurs - Dispositifs microelectromecaniques - Partie 25: Technologie de fabrication de MEMS a base de silicium - Methode de mesure de la resistance a la traction-compression et au cisaillement d´une micro zone de brasure)

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Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures
(Dispositifs a semiconducteurs - Dispositifs microelectromecaniques - Partie 26: Description et methodes de mesure pour structures de microtranchees et de microaiguille)

Available languages: English and French

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Semiconductor devices - Micro-electromechanical devices - Part 27: Bond strength test for glass frit bonded structures using micro-chevron-tests (MCT)

Available languages: English

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Semiconductor devices - Micro-electromechanical devices - Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices

Available languages: English

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