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JIS - Japanese technical standards
Page 335
JIS C5630-1:2017 (21/03/2017)
Semiconductor devices -- Micro-electromechanical devices -- Part 1: Terms and definitions
Available languages: Japanese
Available design: electronic design (pdf), Print design
from 4 825.00 USD more info
JIS C5630-12:2014 (20/02/2014)
Semiconductor devices -- Micro-electromechanical devices -- Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
Available languages: Japanese
Available design: electronic design (pdf), Print design
from 4 236.60 USD more info
JIS C5630-13:2014 (20/02/2014)
Semiconductor devices -- Micro-electromechanical devices -- Part 13: Bend-and shear-type test methods of measuring adhesive strength for MEMS structures
Available languages: Japanese
Available design: electronic design (pdf), Print design
from 3 059.70 USD more info
JIS C5630-18:2014 (22/12/2014)
Semiconductor devices -- Micro-electromechanical devices -- Part 18: Bend testing methods of thin film materials
Available languages: Japanese
Available design: electronic design (pdf), Print design
from 3 059.70 USD more info
JIS C5630-19:2014 (22/12/2014)
Semiconductor devices -- Micro-electromechanical devices -- Part 19: Electronic compasses
Available languages: Japanese
Available design: electronic design (pdf), Print design
from 4 236.60 USD more info
JIS C5630-2:2009 (20/03/2009)
Semiconductor devices -- Micro-electromechanical devices-- Part 2: Tensile testing method of thin film materials
Available languages: Japanese
Available design: electronic design (pdf), Print design
from 2 589.00 USD more info
JIS C5630-20:2015 (20/11/2015)
Semiconductor devices -- Micro-electromechanical devices -- Part 20: Gyroscopes
Available languages: Japanese
Available design: electronic design (pdf), Print design
from 5 060.40 USD more info
JIS C5630-26:2017 (20/10/2017)
Semiconductor devices -- Micro-electromechanical devices -- Part 26: Description and measurement methods for micro trench and needle structures
Available languages: Japanese
Available design: electronic design (pdf), Print design
from 4 236.60 USD more info
JIS C5630-28:2020 (23/03/2020)
Semiconductor devices -- Micro-electromechanical devices -- Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices
Available languages: Japanese
Available design: electronic design (pdf), Print design
from 3 059.70 USD more info
JIS C5630-3:2009 (20/03/2009)
Semiconductor devices -- Micro-electromechanical devices-- Part 3: Thin film standard test piece for tensile testing
Available languages: Japanese
Available design: electronic design (pdf), Print design
from 2 118.30 USD more info
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